Mass detection through parametric analysis and symmetry-breaking in a MEMS array

Clément Grenat (1) , V-N. Nguyen (2) , Sébastien Baguet (1) , Régis Dufour (1) , Claude-Henri Lamarque (3)

1 DCS - Dynamique et Contrôle des Structures
2 LaMCoS - Laboratoire de Mécanique des Contacts et des Structures [Villeurbanne]
3 LTDS - Laboratoire de Tribologie et Dynamique des Systèmes

Due to their low cost, size and precision M/NEMS are efficient sensors. M/NEMS sensors are used in various domains ranging from aeronautics to medicine or telecommunication, with applications such as chemical, inertial or mass sensing. Our previous researches on mass sensing were focused on a single resonator. In this work, a symmetric array of three resonant nanobeams is analysed. The originality lies in the use of a direct parametric analysis to sense an added mass during a symmetry-breaking event.

Domaines: Vibrations [physics.class-ph]; Micro et nanotechnologies/Microélectronique

Clément Grenat, V-N. Nguyen, Sébastien Baguet, Régis Dufour, Claude-Henri Lamarque. Mass detection through parametric analysis and symmetry-breaking in a MEMS array. ENOC 2017, 9th European Nonlinear Dynamics Conference, Jun 2017, Budapest, Hungary. ⟨hal-01667934⟩