Real time sensing in the non linear regime of NEMs resonators

Marc Sansa (1) , van Nghi Nguyen (2) , Sébastien Baguet (3) , Claude-Henri Lamarque (4) , Régis Dufour (3) , Sébastien Hentz (1)

1 UGA [2016-2019] - Université Grenoble Alpes [2016-2019]
2 Université de Lyon
3 LaMCoS - Laboratoire de Mécanique des Contacts et des Structures [Villeurbanne]
4 ENTPE - École Nationale des Travaux Publics de l'État

This paper reports the proof of concept of a nonlinear detection scheme for Nanoelectromechanical resonators for sensing applications. This set-up increases the dynamic range of a resonant sensor by operating it at amplitudes beyond its limit of linearity. Unlike other works in non-linear sensing, this method allows the tracking of the resonance frequency in real time, while being suitable for multi-mode operation and hence, single-particle detection for example.

Mots clés: Hafnium compounds; Decision support systems; Micromechanical devices

Domaines: Vibrations [physics.class-ph]; Micro et nanotechnologies/Microélectronique

Marc Sansa, van Nghi Nguyen, Sébastien Baguet, Claude-Henri Lamarque, Régis Dufour, et al.. Real time sensing in the non linear regime of NEMs resonators. IEEE 29th International Conference on Micro Electro Mechanical Systems (MEMS), Jan 2016, Shanghai, China. ⟨10.1109/MEMSYS.2016.7421814⟩. ⟨hal-01667889⟩