Nitride Nanowires: From Rigid to Flexible Piezo-generators

L. Lu (1) , N. Jamond (1) , Pascal Chrétien (2) , F. Houzé (2) , L. Travers (1) , J. C. Harmand (1) , F. Glas (1) , F. H. Julien (1) , E. Lefeuvre (1) , N. Gogneau (1) , Maria Tchernycheva (3)

1 C2N - Centre de Nanosciences et de Nanotechnologies [Marcoussis]
2 GeePs - Laboratoire Génie électrique et électronique de Paris
3 C2N - Centre de Nanosciences et de Nanotechnologies [Orsay]

Here we employ self-assembled Mg-doped GaN nanowires(NWs) grown by plasma assisted molecular beam epitaxy on Si(111) substrates to fabricate piezogenerators. We will first discuss the fabrication and testing of rigid nanowire-based generators and then a flexible generator prototype will be shown.

Domaines: Science des matériaux [cond-mat.mtrl-sci]; Matériaux; Micro et nanotechnologies/Microélectronique; Electronique

L. Lu, N. Jamond, Pascal Chrétien, F. Houzé, L. Travers, et al.. Nitride Nanowires: From Rigid to Flexible Piezo-generators. PowerMEMS 2016, Dec 2016, Paris, France. ⟨10.1088/1742-6596/773/1/012010⟩. ⟨hal-01653358⟩