S. Huang, Improved Light Extraction of Nitride-Based Flip-Chip Light-Emitting Diodes Via Sapphire Shaping and Texturing, IEEE Photonics Technology Letters, vol.18, issue.24, pp.2623-2625, 2006.
DOI : 10.1109/LPT.2006.886823

G. Lott, N. Faletto, P. Devilder, and R. Kling, Optimizing the processing of sapphire with ultrashort laser pulses, Journal of Laser Applications, vol.28, issue.2, pp.22206-22216, 2016.
DOI : 10.2351/1.4944509

Q. Li, Sapphire-Based Fresnel Zone Plate Fabricated by Femtosecond Laser Direct Writing and Wet Etching, IEEE Photonics Technology Letters, vol.28, issue.12, pp.1290-1293, 2016.
DOI : 10.1109/LPT.2016.2538270

C. Danson, D. Hillier, N. Hopps, and D. Neely, Abstract, High Power Laser Science and Engineering, vol.75, issue.5, p.52, 2015.
DOI : 10.1364/JOSAA.1.001003

D. Ashkenasi, A. Rosenfeld, H. Varel, M. Wähmer, and E. E. Campbell, Laser processing of sapphire with picosecond and sub-picosecond pulses, Applied Surface Science, vol.120, issue.1-2, pp.65-8010, 1997.
DOI : 10.1016/S0169-4332(97)00218-3

G. Eberle, M. Schmidt, F. Pude, and K. Wegener, Laser surface and subsurface modification of sapphire using femtosecond pulses, Applied Surface Science, vol.378, pp.504-512, 2016.
DOI : 10.1016/j.apsusc.2016.04.032

S. Juodkazis, K. Nishimura, and H. Misawa, In-bulk and surface structuring of sapphire by femtosecond pulses, Applied Surface Science, vol.253, issue.15, pp.6539-6544097, 2007.
DOI : 10.1016/j.apsusc.2007.01.097

A. Chmel, S. B. Eronko, A. M. Kondyrev, V. Nazarova, and . Ya, Optical resistance of sapphire, Journal of Materials Science, vol.12, issue.17, pp.4673-468010, 1993.
DOI : 10.1007/BF00414257

Y. Wang, S. Liu, G. Peng, S. Zhou, and J. Xu, Effects of surface treatment on sapphire substrates, Journal of Crystal Growth, vol.274, issue.1-2, pp.241-245, 2005.
DOI : 10.1016/j.jcrysgro.2004.09.074

B. Hader and O. Weis, Superpolishing sapphire: a method to produce atomically flat and damage free surfaces, Surface Science, vol.22089, pp.118-13010, 1989.
DOI : 10.1016/0039-6028(89)90466-4

T. Suratwala, Sub-surface mechanical damage distributions during grinding of fused silica, Journal of Non-Crystalline Solids, vol.352, issue.52-54, pp.5601-5617012, 2006.
DOI : 10.1016/j.jnoncrysol.2006.09.012
URL : https://lasers.llnl.gov/publications/pdfs/suratwala.pdf

T. Suratwala, Effect of rogue particles on the sub-surface damage of fused silica during grinding/polishing, Journal of Non-Crystalline Solids, vol.354, issue.18, pp.2023-2037, 2008.
DOI : 10.1016/j.jnoncrysol.2007.11.015

B. Bertussi, J. Natoli, and M. Commandré, Effect of polishing process on silica surface laser-induced damage threshold at 355 nm, Optics Communications, vol.242, issue.1-3, pp.227-231, 2004.
DOI : 10.1016/j.optcom.2004.08.016
URL : https://hal.archives-ouvertes.fr/hal-00082114

J. Néauport, L. Lamaignère, H. Bercegol, F. Pilon, and J. Birolleau, Polishing-induced contamination of fused silica optics and laser induced damage density at 351 nm, Optics Express, vol.13, issue.25, pp.10163-10171, 2005.
DOI : 10.1364/OPEX.13.010163

Y. Li, Generation of Scratches and Their Effects on Laser Damage Performance of Silica Glass, Scientific Reports, vol.90, issue.1, pp.10-1038, 2016.
DOI : 10.1063/1.2431705

O. Uteza, Laser-induced damage threshold of sapphire in nanosecond, picosecond and femtosecond regimes, Applied Surface Science, vol.254, issue.4, pp.799-803046, 2007.
DOI : 10.1016/j.apsusc.2007.09.046
URL : https://hal.archives-ouvertes.fr/ujm-00376961

D. Nieto, J. M. Arines, G. M. O-'connor, and M. T. Flores-arias, Single-pulse laser ablation threshold of borosilicate, fused silica, sapphire, and soda-lime glass for pulse widths of 500??????fs, 10??????ps, 20??????ns, Applied Optics, vol.54, issue.29, pp.8596-860110, 2015.
DOI : 10.1364/AO.54.008596

J. Han, C. Li, M. Zhang, H. Zuo, and S. Meng, An investigation of long pulsed laser induced damage in sapphire, Optics & Laser Technology, vol.41, issue.3, pp.339-344, 2009.
DOI : 10.1016/j.optlastec.2008.05.026

S. Luo, Sapphire (0001) surface modifications induced by long-pulse 1054nm laser irradiation, Applied Surface Science, vol.253, issue.24, pp.9457-9466012, 2007.
DOI : 10.1016/j.apsusc.2007.06.012

A. M. Prokhorov, V. I. Konov, I. Ursu, and I. N. Mihailescu, Laser heating of metals, p.England, 1990.

L. G. Deshazer, B. E. Newnam, and K. M. Leung, Role of coating defects in laser???induced damage to dielectric thin films, Applied Physics Letters, vol.23, issue.11, pp.607-60910, 1973.
DOI : 10.1364/AO.12.000661

S. Martin, A. Hertwig, M. Lenzner, J. Krüger, and W. Kautek, Spot-size dependence of the ablation threshold in dielectrics for femtosecond laser pulses, Applied Physics A: Materials Science & Processing, vol.77, issue.7, pp.883-88410, 2003.
DOI : 10.1007/s00339-003-2213-6

R. M. Wood, Laser-induced damage of optical materials, 2003.
DOI : 10.1887/0750308451

M. J. Soileau, Laser-induced damage to optical materials. Handbook of Optics, 2010.

B. C. Stuart, Nanosecond-to-femtosecond laser-induced breakdown in dielectrics, Physical Review B, vol.91, issue.4, pp.1749-176110, 1996.
DOI : 10.1364/AO.16.001204

N. Sanner, Toward determinism in surface damaging of dielectrics using few-cycle laser pulses, Applied Physics Letters, vol.20, issue.7, p.3309700, 2010.
DOI : 10.1117/12.7977089

A. Duparré, Surface characterization techniques for determining the root-mean-square roughness and power spectral densities of optical components, Applied Optics, vol.41, issue.1, pp.154-17110, 2002.
DOI : 10.1364/AO.41.000154

N. Bloembergen, Role of Cracks, Pores, and Absorbing Inclusions on Laser Induced Damage Threshold at Surfaces of Transparent Dielectrics, Applied Optics, vol.12, issue.4, pp.661-664000661, 1973.
DOI : 10.1364/AO.12.000661

F. Y. Génin, A. Salleo, T. V. Pistor, and L. L. Chase, Role of light intensification by cracks in optical breakdown on surfaces, Journal of the Optical Society of America A, vol.18, issue.10, pp.2607-2616, 2001.
DOI : 10.1364/JOSAA.18.002607

B. Bussière, Bulk laser-induced damage threshold of titanium-doped sapphire crystals, Applied Optics, vol.51, issue.32, pp.7826-7833007826, 2012.
DOI : 10.1364/AO.51.007826

J. O. Porteus and S. C. Seitel, Absolute onset of optical surface damage using distributed defect ensembles, Applied Optics, vol.23, issue.21, pp.3796-3805003796, 1984.
DOI : 10.1364/AO.23.003796

H. Krol, L. Gallais, C. Grèzes-besset, J. Natoli, and M. Commandré, Investigation of nanoprecursors threshold distribution in laser-damage testing, Optics Communications, vol.256, issue.1-3, pp.184-189, 2005.
DOI : 10.1016/j.optcom.2005.06.059
URL : https://hal.archives-ouvertes.fr/hal-00018298

B. Bussière, Etude des mécanismes d' endommagement par laser impulsionnel des cristaux de Saphir dopé Titane, 2010.

L. Keldysh, Ionization in the field of a strong electromagnetic wave, Sov. Phys. JETP, vol.20, issue.5, pp.1307-1314, 1965.

S. Papernov and A. W. Schmid, Correlations between embedded single gold nanoparticles in SiO2 thin film and nanoscale crater formation induced by pulsed-laser radiation, Journal of Applied Physics, vol.4, issue.10, pp.5720-572810, 2002.
DOI : 10.1070/QE1978v008n01ABEH008443

M. Elson, J. Bennett, and J. M. , Calculation of the power spectral density from surface profile data, Applied Optics, vol.34, issue.1, pp.201-208, 1995.
DOI : 10.1364/AO.34.000201