Influence of PE-ALD of GaP on the Silicon Wafers Quality

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https://hal.archives-ouvertes.fr/hal-01629362
Contributor : Sylvain Le Gall <>
Submitted on : Monday, November 6, 2017 - 1:27:44 PM
Last modification on : Thursday, September 12, 2019 - 5:16:02 PM

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Artem Baranov, Alexander S. Gudovskikh, Dmitriy A. Kudryashov, Ivan A. Morozov, Alexey M. Mozharov, et al.. Influence of PE-ALD of GaP on the Silicon Wafers Quality. physica status solidi (a), Wiley, 2017, ⟨10.1002/pssa.201700685⟩. ⟨hal-01629362⟩

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