Device pattern impact on optical endpoint detection by interferometry for STI CMP

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https://hal.archives-ouvertes.fr/hal-01622593
Contributor : Gaëlle Georges <>
Submitted on : Tuesday, October 24, 2017 - 3:01:27 PM
Last modification on : Monday, March 4, 2019 - 2:04:24 PM

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  • HAL Id : hal-01622593, version 1

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Sophia Bourzgui, Agnès Roussy, Jakey Blue, Gaëlle Georges, Emilie Faivre, et al.. Device pattern impact on optical endpoint detection by interferometry for STI CMP. International Conference on Planarization/CMP Technology, Oct 2017, Leuven, Belgium. ⟨hal-01622593⟩

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