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Further optimization of VLS localized epitaxy for deeper 4H-SiC p-n junctions

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https://hal.archives-ouvertes.fr/hal-01615190
Contributor : Gabriel Ferro <>
Submitted on : Thursday, October 12, 2017 - 9:46:07 AM
Last modification on : Monday, September 13, 2021 - 2:44:04 PM

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Gabriel Ferro, Selsabil Sejil, Mihai Lazar, D. Carole, C. Brylinski, et al.. Further optimization of VLS localized epitaxy for deeper 4H-SiC p-n junctions. physica status solidi (a), Wiley, 2017, 214 (4), ⟨10.1002/pssa.201600454⟩. ⟨hal-01615190⟩

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