Microwave Sensor within a Microfluidic Chip for Biological Applications

Abstract : A miniaturized sensor operating in Radio Frequency region (RF) is proposed to address the need in picoliter liquid characterization. The sensor is based on a coplanar waveguide (CPW) combined with a microfluidic channel dedicated to microliter liquid characterization with perspectives for biology and single cell characterization. Using microtechnology process, the sensor has been designed on a 0.5 mm thick quartz wafer with Cr/Au electrodes. A prototype of the sensor has been fabricated and evaluated with ethanol/water mixtures at different molar fractions of ethanol. A good agreement between theoretical and measured electrical response of the sensor is observed.
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Contributor : Bruno Le Pioufle <>
Submitted on : Friday, September 22, 2017 - 4:15:07 PM
Last modification on : Tuesday, January 15, 2019 - 2:54:15 PM

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Abdelhatif El Fellahi, Thierry Bore, Lionel Rousseau, Bruno Le Pioufle, Olivier Français. Microwave Sensor within a Microfluidic Chip for Biological Applications. Eurosensors, Sep 2017, Paris, France. pp.523, ⟨10.3390/proceedings1040523⟩. ⟨hal-01592115⟩

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