High-throughput heterodyne thermoreflectance: Application to thermal conductivity measurements of a Fe–Si–Ge thin film alloy library

Quentin d'Acremont (1, 2) , Gilles Pernot (3) , Jean-Michel Rampnoux (2) , Andrej Furlan (4) , David Lacroix (3) , Alfred Ludwig (4) , Stefan Dilhaire (2)

1 Amplitude Systèmes
2 LOMA - Laboratoire Ondes et Matière d'Aquitaine
3 LEMTA - Laboratoire d'Energétique et Mécanique Théorique et Appliquée
4 Institute for Materials

A High-Throughput Time-Domain ThermoReflectance (HT-TDTR) technique was developed to perform fast thermal conductivity measurements with minimum user actions required. This new setup is based on a heterodyne picosecond thermoreflectance system. The use of two different laser oscillators has been proven to reduce the acquisition time by two orders of magnitude and avoid the experimental artefacts usually induced by moving the elements present in TDTR systems. An amplitude modulation associated to a lock-in detection scheme is included to maintain a high sensitivity to thermal properties. We demonstrate the capabilities of the HT-TDTR setup to perform high-throughput thermal analysis by mapping thermal conductivity and interface resistances of a ternary thin film silicide library FexSiyGe100-x-y (20 < x, y < 80) deposited by wedge-type multi-layer method on a 100 mm diameter sapphire wafer offering more than 300 analysis areas of different ternary alloy compositions.

Domaines: Thermique [physics.class-ph]; Science des matériaux [cond-mat.mtrl-sci]; Micro et nanotechnologies/Microélectronique

Quentin d'Acremont, Gilles Pernot, Jean-Michel Rampnoux, Andrej Furlan, David Lacroix, et al.. High-throughput heterodyne thermoreflectance: Application to thermal conductivity measurements of a Fe–Si–Ge thin film alloy library. Review of Scientific Instruments, 2017, 88 (7), pp.074902. ⟨10.1063/1.4986469⟩. ⟨hal-01578168v2⟩