Micromirrors with controlled amplitude and phase

Julien Lumeau 1 Cihan Koc 1 Thomas Begou 1
1 RCMO - RCMO
FRESNEL - Institut FRESNEL
Abstract : This paper describes the fabrication of circular micro-mirrors with diameters between 50 and 150 µm with controlled amplitude and phase. Design, manufacturing and characterization method are presented.
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Submitted on : Wednesday, March 13, 2019 - 12:04:09 PM
Last modification on : Friday, March 22, 2019 - 9:42:34 AM

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Julien Lumeau, Cihan Koc, Thomas Begou. Micromirrors with controlled amplitude and phase. Applied optics, Optical Society of America, 2017, 56 (20), pp.5655-5660. ⟨10.1364/AO.56.005655⟩. ⟨hal-01558472⟩

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