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Article Dans Une Revue Applied optics Année : 2003

Measurement of thermally induced vibrations of microelectronic devices by use of a heterodyne electronic speckle pattern interferometry imaging technique

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hal-01550902 , version 1 (29-06-2017)

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Stéphane Grauby, S. Dilhaire, S. Jorez, L. D. P. Lopez, Jean-Michel Rampnoux, et al.. Measurement of thermally induced vibrations of microelectronic devices by use of a heterodyne electronic speckle pattern interferometry imaging technique. Applied optics, 2003, 42 (10), pp.1763-1768. ⟨10.1364/ao.42.001763⟩. ⟨hal-01550902⟩

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