Electron transport parameters in NF₃

V. A. Lisovskiy , V. D. Yegorenkov , P. Ogloblina , Jean-Paul Booth (1) , S. Martins , K. Landry , D. Douai , V. Cassagne

1 LPP - Laboratoire de Physique des Plasmas

We present electron transport parameters (the first Townsend coefficient, the dissociative attachment coefficient, the fraction of electron energy lost by collisions with NF 3 molecules, the average and characteristic electron energy, the electron mobility and the drift velocity) in NF 3 gas calculated from published elastic and inelastic electron?NF 3 collision cross-sections using the BOLSIG code. Calculations were performed for the combined RB (Rescigno 1995 Phys. Rev. E 52 [http://dx.doi.org/10.1103/PhysRevA.52.329] 329 , Boesten et al 1996 J. Phys. B: At. Mol. Opt. Phys. 29 [http://dx.doi.org/10.1088/0953-4075/29/22/022] 5475 ) momentum-transfer cross-section, as well as for the JB (Joucoski and Bettega 2002 J. Phys. B: At. Mol. Opt. Phys. 35 [http://dx.doi.org/10.1088/0953-4075/35/4/303] 783 ) momentum-transfer cross-section. In addition, we have measured the radio frequency (rf) breakdown curves for various inter-electrode gaps and rfs, and from these we have determined the electron drift velocity in NF 3 from the location of the turning point in these curves. These drift velocity values are in satisfactory agreement with those calculated by the BOLSIG code employing the JB momentum-transfer cross-section.

Domaines: Physique des plasmas [physics.plasm-ph]

V. A. Lisovskiy, V. D. Yegorenkov, P. Ogloblina, Jean-Paul Booth, S. Martins, et al.. Electron transport parameters in NF₃. Journal of Physics D: Applied Physics, 2014, 47 (11), pp.115203. ⟨10.1088/0022-3727/47/11/115203⟩. ⟨hal-01549378⟩