Highly vibrationally excited O2 molecules in low-pressure inductively-coupled plasmas detected by high sensitivity ultra-broad-band optical absorption spectroscopy
Résumé
Inductively-coupled plasmas in pure O 2 (at pressures of 5?80?mTorr and radiofrequency power up to 500?W) were studied by optical absorption spectroscopy over the spectral range 200?450?nm, showing the presence of highly vibrationally excited O 2 molecules (up to v? = 18) by Schumann?Runge band absorption. Analysis of the relative band intensities indicates a vibrational temperature up to 10,000?K, but these hot molecules only represent a fraction of the total O 2 density. By analysing the (11-0) band at higher spectral resolution the O 2 rotational temperature was also determined, and was found to increase with both pressure and power, reaching 900?K at 80?mTorr 500?W. These measurements were achieved using a new high-sensitivity ultra-broad-band absorption spectroscopy setup, based on a laser-plasma light source, achromatic optics and an aberration-corrected spectrograph. This setup allows the measurement of weak broadband absorbances due to a baseline variability lower than 2???×???10 ?5 across a spectral range of 250?nm.