Temperature-drift rejection and sensitivity to mismatch of synchronized strongly-coupled M/NEMS resonators

Pierre Prache (1, 2) , Arantxa Uranga (2) , Nuria Barniol (2) , Jérôme Juillard (1)

1 GeePs - Laboratoire Génie électrique et électronique de Paris
2 Department of Electronics [Barcelona]

Domaines: Micro et nanotechnologies/Microélectronique; Electronique

Pierre Prache, Arantxa Uranga, Nuria Barniol, Jérôme Juillard. Temperature-drift rejection and sensitivity to mismatch of synchronized strongly-coupled M/NEMS resonators . 2016 IEEE 29th International Conference on Micro Electro Mechanical Systems (MEMS) , Jan 2016, Shanghai, China. pp.1054 - 1057 ⟨10.1109/MEMSYS.2016.7421815⟩. ⟨hal-01535647⟩