Resonant pull-in of high-Q MEMS oscillators with arbitrary closed-loop phase shift

Abstract : In this article, we develop a simple closed-form expression of the resonant pull-in instability of high-Q MEMS resonators actuated with arbitrary periodic waveforms and arbitrary closed-loop phase shifts. The instability of MEMS oscillators operated under a low bias voltage is shown to be independent of the dimensions and physical properties of the resonator and fully-determined by the quadrature component of the actuation. The results are illustrated on parallel-plate capacitive MEMS actuated with sine-, square- and pulsed-wave voltages. Input-design methods optimizing the pull-in conditions of sensors and switches can be built based on our conclusions.
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https://hal.archives-ouvertes.fr/hal-01535641
Contributor : Jérôme Juillard <>
Submitted on : Friday, June 9, 2017 - 11:40:50 AM
Last modification on : Thursday, March 21, 2019 - 2:42:00 PM

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Alexis Brenes, Jérôme Juillard, Filipe Vinci dos Santos. Resonant pull-in of high-Q MEMS oscillators with arbitrary closed-loop phase shift. 0th Eurosensors Conference, EUROSENSORS 2016, Sep 2016, Budapest, Hungary. ⟨10.1016/j.proeng.2016.11.311⟩. ⟨hal-01535641⟩

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