Laser-induced periodic surface structures formation on mesoporous silicon from nanoparticles produced by picosecond and femtosecond laser shots

Abderazek Talbi (1) , Sostaine Kaya-Boussougou (1) , Audrey Sauldubois , Arnaud Stolz (1) , Chantal Boulmer-Leborgne (1) , Nadjib Semmar (1)

1 GREMI - Groupe de recherches sur l'énergétique des milieux ionisés

This paper deals with the formation of laser-induced periodic surface structures (LIPSS) on mesoporous silicon thin films induced by two laser regimes in the UV range: picosecond and femtosecond. Different LIPSS formation mechanisms from nanoparticles, mainly coalescence and agglomeration, have been evidenced by scanning electron microscopy analysis. The apparition of a liquid phase during both laser interaction at low fluence (20 mJ/cm2) and after a large number of laser pulses (up to 12,000) has been also shown with 100 nm size through incubation effect. Transmission electron microscopy analyses have been conducted to investigate the molten phase structures below and inside LIPSS. Finally, it has shown that LIPSS are composed of amorphous silicon when mesoporous silicon is irradiated by laser beam in both regimes. Nevertheless, mesoporous silicon located between LIPSS stays crystallized.

Mots clés: LIPSS; mesoporous; silicon; laser ablation; ultrashort pulse; incubation

Domaines: Génie des procédés; Matière Condensée [cond-mat]; Matériaux; Micro et nanotechnologies/Microélectronique

Abderazek Talbi, Sostaine Kaya-Boussougou, Audrey Sauldubois, Arnaud Stolz, Chantal Boulmer-Leborgne, et al.. Laser-induced periodic surface structures formation on mesoporous silicon from nanoparticles produced by picosecond and femtosecond laser shots. Applied physics. A, Materials science & processing, 2017, 123, pp.463. ⟨10.1007/s00339-017-1075-2⟩. ⟨hal-01533020⟩