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Conference papers
Highly-Efficient Subwavelength Engineered Grating Couplers for Silicon-on-Insulator Waveguides
D Benedikovic
1
C Alonso-Ramos
1
P Cheben
2
J Schmid
2
S Wang
2
D-X Xu
2
R Halir
3
A Ortega-Moñux
3
L Vivien
1
J Lapointe
2
S Janz
2
J-G Wangüemert-Pérez
3
I Molina-Fernández
3
J-M Fédéli
4
M Dado
5
1
C2N - Centre de Nanosciences et de Nanotechnologies [Orsay] (Batiment 220 Université Paris Sud - France)
- UP11 - Université Paris-Sud - Paris 11 : UMR 9001 (Bâtiment 300 - 91405 Orsay cedex - France)
- Université Paris-Saclay (Espace Technologique, Bat. Discovery - RD 128 - 2e ét., 91190 Saint-Aubin - France)
- CNRS - Centre National de la Recherche Scientifique : UMR 9001 (France)
2
NRC - National Research Council of Canada (1200 Montreal Road, Building M-58, Ottawa, Ontario K1A 0R6 - Canada)
3
Departamento de Ingeniería de Comunicaciones (Spain)
- Universidad de Málaga [Málaga] = University of Málaga [Málaga] (Avda. Cervantes, 2 29071 MÁLAGA - Spain)
4
CEA-LETI - Commissariat à l'énergie atomique et aux énergies alternatives - Laboratoire d'Electronique et de Technologie de l'Information (MINATEC 17, rue des Martyrs, 38054, Grenoble Cedex 9 - France)
- DRT (CEA) - Direction de Recherche Technologique (CEA) : DRT (France)
- CEA - Commissariat à l'énergie atomique et aux énergies alternatives : DRT (Centre de Saclay Centre de Grenoble Centre de Cadarache etc - France)
5
Department of Telecommunications and Multimedia (Slovakia)
- University of Žilina (Žilina - Slovakia)
Abstract : We present experimental results of efficient subwavelength index engineered surface grating couplers, developed in a standard 220-nm SOI substrate. Grating couplers are fabricated using a single full etch or a dual etch process (full etch and 70nm shallow etch). The measured efficiency of -2.2 dB, -2.5 dB, and -0.7 dB are reported for single-etch couplers without and with metal reflector in the near-IR wavelengths. We demonstrate a peak coupling efficiency of -1.3 dB for a novel and flexible dual-etch grating coupler with interleaved deep and shallow etched trenches.
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Conference papers
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https://hal.archives-ouvertes.fr/hal-01527629
Contributor : Laurent Vivien <>
Submitted on : Wednesday, May 31, 2017 - 2:12:01 PM
Last modification on : Wednesday, October 14, 2020 - 3:41:41 AM
Contributor : Laurent Vivien <>
Submitted on : Wednesday, May 31, 2017 - 2:12:01 PM
Last modification on : Wednesday, October 14, 2020 - 3:41:41 AM
Identifiers
- HAL Id : hal-01527629, version 1
Citation
D Benedikovic, C Alonso-Ramos, P Cheben, J Schmid, S Wang, et al.. Highly-Efficient Subwavelength Engineered Grating Couplers for Silicon-on-Insulator Waveguides. 18th European Conference in Integrated Optics (ECIO 2016), May 2016, Varsovie, Poland. ⟨hal-01527629⟩
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