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Highly-Efficient Subwavelength Engineered Grating Couplers for Silicon-on-Insulator Waveguides

D Benedikovic 1 C Alonso-Ramos 1 P Cheben 2 J Schmid 2 S Wang 2 D-X Xu 2 R Halir 3 A Ortega-Moñux 3 L Vivien 1 J Lapointe 2 S Janz 2 J-G Wangüemert-Pérez 3 I Molina-Fernández 3 J-M Fédéli 4 M Dado 5 
1 C2N - Centre de Nanosciences et de Nanotechnologies [Orsay]
2 NRC - National Research Council of Canada
3 Departamento de Ingeniería de Comunicaciones
4 CEA-LETI - Commissariat à l'énergie atomique et aux énergies alternatives - Laboratoire d'Electronique et de Technologie de l'Information
5 Department of Telecommunications and Multimedia
Abstract : We present experimental results of efficient subwavelength index engineered surface grating couplers, developed in a standard 220-nm SOI substrate. Grating couplers are fabricated using a single full etch or a dual etch process (full etch and 70nm shallow etch). The measured efficiency of -2.2 dB, -2.5 dB, and -0.7 dB are reported for single-etch couplers without and with metal reflector in the near-IR wavelengths. We demonstrate a peak coupling efficiency of -1.3 dB for a novel and flexible dual-etch grating coupler with interleaved deep and shallow etched trenches.
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https://hal.archives-ouvertes.fr/hal-01527629
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Submitted on : Wednesday, May 31, 2017 - 2:12:01 PM
Last modification on : Saturday, June 25, 2022 - 10:24:36 PM

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  • HAL Id : hal-01527629, version 1

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CEA | CNRS | DRT | CEA-UPSAY | UNIV-PARIS-SACLAY | LETI | CEA-GRE | UP-SCIENCES

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D Benedikovic, C Alonso-Ramos, P Cheben, J Schmid, S Wang, et al.. Highly-Efficient Subwavelength Engineered Grating Couplers for Silicon-on-Insulator Waveguides. 18th European Conference in Integrated Optics (ECIO 2016), May 2016, Varsovie, Poland. ⟨hal-01527629⟩

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