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Functional oxides on Silicon and Sapphire substrates for photonic applications

Abstract : Silicon photonics is expected to address a wide range of applications including sensing, datacom and security with the potential to develop low-cost and complex circuits using silicon fabrication facilities. In this context, the hybrid integration of functional oxides on silicon photonic devices is a promising approach to bring other properties including multiferroicity, piezoelectricity, nonlinear optical properties in silicon photonics platform. Our work focuses on the integration of Yttria-Stabilized Zirconia (YSZ) functional oxide on sapphire substrates and on silicon. The common aim for both integrations is to induce nonlinear optical effects at the wavelength around 1550nm, thanks to strain tuning in full oxide-or in hybrid oxide/Si-structures. This study includes the epitaxial growth of YSZ oxide thin layers by pulsed laser deposition technique (PLD) on silicon and sapphire substrates, their characterizations by several complementary techniques such as X-ray diffraction, AFM, SEM, TEM microscopies, and Raman spectroscopy, and also the fabrication and optical characterization of oxide-based photonic structures (gratings coupler and waveguides essentially). First, YSZ photonic structures were fabricated on sapphire substrates and characterized optically. We work on the optimization of the oxide growth (crystal quality and orientation) and fabrication processes to improve the optical transmission of YSZ. Then, YSZ was directly integrated on silicon substrate, to strain the Si lattice in order to study nonlinear optical properties of silicon. Indeed, the epitaxial growth of this oxide strains the silicon due to the difference of thermal expansion and the lattice mismatch. This can also play a role when YSZ is used as a buffer layer to integrate other functional oxides. We work on the growth of YSZ on silicon to improve the strain field applied to the photonic structures (measured with Raman spectroscopy) and their optical transmission. We will present and discuss our last results on the epitaxial growth of YSZ functional oxide by PLD on both sapphire and silicon substrates and on the fabrication and optical characterization of the oxide-based photonic structures.
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https://hal.archives-ouvertes.fr/hal-01527626
Contributor : Laurent Vivien <>
Submitted on : Wednesday, May 31, 2017 - 2:09:42 PM
Last modification on : Monday, January 4, 2021 - 10:48:05 AM

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  • HAL Id : hal-01527626, version 1

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Guillaume Marcaud, Sylvia Matzen, Carlos Alonso-Ramos, Xavier Le Roux, Mathias Berciano, et al.. Functional oxides on Silicon and Sapphire substrates for photonic applications. TO-BE Spring Meeting 2017, 2017, Luxembourg, Luxembourg. ⟨hal-01527626⟩

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