Microelectromechanical variable-bandwidth if frequency filters with tunable electrostatical coupling spring

Abstract : This paper describes the theory, design and test of a novel architecture of highly-selective micromechanical filters employing electrostatically coupled resonators with floating or biased coupling electrodes. This original method avoids the use of mechanical coupling springs thus extending the potential of a given process to higher frequencies. It gives also the possibility to implement more complex filter architectures and to tune the coupling factor of resonators. Filters with 2.8 MHz and 10.6 MHz center frequency having tunable relative bandwidths of 0.025-0.17% have been built from pairs of clamped-clamped beam resonators. Special design techniques have been used to reduce parasitic capacitances on the coupling node.
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Contributor : Dimitri Galayko <>
Submitted on : Saturday, May 13, 2017 - 12:30:21 PM
Last modification on : Thursday, October 18, 2018 - 1:22:07 AM

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Dimitri Galayko, Andreas Kaiser, Lionel Buchaillot, Dominique Collard, Chantal Combi. Microelectromechanical variable-bandwidth if frequency filters with tunable electrostatical coupling spring. Micro Electro Mechanical Systems, 2003. MEMS-03 Kyoto. IEEE The Sixteenth Annual International Conference on, Jan 2003, Kyoto, Japan. ⟨10.1109/MEMSYS.2003.1189709⟩. ⟨hal-01522205⟩

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