Ferroelectric oxide thin films for reconfigurable microwave devices: a focus on growth, characterization and integration of thin films in the (K,Na) - (Ta,Nb) - O system

Maryline Guilloux-Viry (1) , Barthélemy Aspe (2, 1) , Fatou Cissé (2, 1) , Valérie Demange (1) , Stéphanie Députier (1) , Valérie Bouquet (1) , Sophie Ollivier (1) , Ronan Sauleau (2) , Xavier Castel (2)

1 ISCR - Institut des Sciences Chimiques de Rennes
2 IETR - Institut d'Électronique et des Technologies du numéRique

Domaines: Matériaux; Micro et nanotechnologies/Microélectronique; Electromagnétisme

Maryline Guilloux-Viry, Barthélemy Aspe, Fatou Cissé, Valérie Demange, Stéphanie Députier, et al.. Ferroelectric oxide thin films for reconfigurable microwave devices: a focus on growth, characterization and integration of thin films in the (K,Na) - (Ta,Nb) - O system. ROCAM 2017, ‘The 9th International Conference on Advanced Materials’, Jul 2017, Bucarest, Romania. 1 pp. ⟨hal-01511385⟩