Integration of functional oxides on silicon for nanoelectronics and energy

Romain Bachelet (1) , Lamis Louahadj (1) , Lucie Mazet (1) , Rahma Moalla (1) , Gang Niu (1) , Philippe Regreny (1) , Bertrand Vilquin (1) , Catherine Dubourdieu (2) , J. Fontcuberta (3) , F. Sanchez , Guillaume Saint-Girons (1)

1 INL - H&N - INL - Hétéroepitaxie et Nanostructures
2 INL - Institut des Nanotechnologies de Lyon
3 Institut de Ciencia de materials de barcelone

no abstract

Domaines: Sciences de l'ingénieur [physics]; Micro et nanotechnologies/Microélectronique; Optique / photonique; Matériaux

Romain Bachelet, Lamis Louahadj, Lucie Mazet, Rahma Moalla, Gang Niu, et al.. Integration of functional oxides on silicon for nanoelectronics and energy. International Conference on Materials and Characterization Techniques (ICMCT), 2014, VIT Univ., Vellore, Chennai, India. ⟨hal-01490283⟩