SrTiO3/GaAs epitaxial templates: role of Ti at the interface, and application to the fabrication of novel opto-mechanical devices

Benjamin Meunier (1) , Romain Bachelet (1) , Geneviève Grenet (1) , Claude Botella (1) , Philippe Regreny (1) , L. Largeau (2) , Jose Penuelas (1) , Guillaume Saint-Girons (1)

1 INL - H&N - INL - Hétéroepitaxie et Nanostructures
2 LPN - Laboratoire de photonique et de nanostructures

no abstract

Domaines: Sciences de l'ingénieur [physics]; Optique / photonique; Matériaux; Micro et nanotechnologies/Microélectronique

Benjamin Meunier, Romain Bachelet, Geneviève Grenet, Claude Botella, Philippe Regreny, et al.. SrTiO3/GaAs epitaxial templates: role of Ti at the interface, and application to the fabrication of novel opto-mechanical devices. JSI 2015, 2015, Toulouse, France. ⟨hal-01489578⟩