A review of molecular beam epitaxy of ferroelectric BaTiO3 films on Si, Ge and GaAs substrates and their applications

Lucie Mazet (1) , Sang Mo Yang (2) , Sergei Kalinin (2) , Sylvie Schamm-Chardon (3, 4) , Catherine Dubourdieu (5)

1 INL - H&N - INL - Hétéroepitaxie et Nanostructures
2 CNMS - Center for Nanophase Materials Sciences [Oak Ridge]
3 CEMES - Centre d'élaboration de matériaux et d'études structurales
4 CEMES-MEM - Matériaux et dispositifs pour l'Electronique et le Magnétisme
5 INL - Institut des Nanotechnologies de Lyon

SrTiO3 epitaxial growth by molecular beam epitaxy (MBE) on silicon has opened up the route to the monolithic integration of various complex oxides on the complementary metal-oxide–semiconductor silicon platform. Among functional oxides, ferroelectric perovskite oxides offer promising perspectives to improve or add functionalities on-chip. We review the growth by MBE of the ferroelectric compound BaTiO3 on silicon (Si), germanium (Ge) and gallium arsenide (GaAs) and we discuss the film properties in terms of crystalline structure, microstructure and ferroelectricity. Finally, we review the last developments in two areas of interest for the applications of BaTiO3 films on silicon, namely integrated photonics, which benefits from the large Pockels effect of BaTiO3, and low power logic devices, which may benefit from the negative capacitance of the ferroelectric.

Domaines: Matériaux; Micro et nanotechnologies/Microélectronique; Science des matériaux [cond-mat.mtrl-sci]; Physique [physics]

Lucie Mazet, Sang Mo Yang, Sergei Kalinin, Sylvie Schamm-Chardon, Catherine Dubourdieu. A review of molecular beam epitaxy of ferroelectric BaTiO3 films on Si, Ge and GaAs substrates and their applications. Science and Technology of Advanced Materials, 2015, 16 (3), pp.036005. ⟨10.1088/1468-6996/16/3/036005⟩. ⟨hal-01489400⟩