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Article Dans Une Revue Science Année : 2016

On-chip and freestanding elastic carbon films for micro-supercapacitors

Yury Gogotsi
  • Fonction : Auteur

Résumé

Integration of electrochemical capacitors with silicon-based electronics is a major challenge, limiting energy storage on a chip. We describe a wafer-scale process for manufacturing strongly adhering carbide-derived carbon films and interdigitated micro-supercapacitors with embedded titanium carbide current collectors, fully compatible with current microfabrication and silicon-based device technology. Capacitance of those films reaches 410 farads per cubic centimeter/200 millifarads per square centimeter in aqueous electrolyte and 170 farads per cubic centimeter/85 millifarads per square centimeter in organic electrolyte. We also demonstrate preparation of self-supported, mechanically stable, micrometer-thick porous carbon films with a Young’s modulus of 14.5 gigapascals, with the possibility of further transfer onto flexible substrates. These materials are interesting for applications in structural energy storage, tribology, and gas separation.
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Dates et versions

hal-01489186 , version 1 (14-03-2017)

Identifiants

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Peihua Huang, Christophe Lethien, Sébastien Pinaud, Kevin Brousse, Raphaël Laloo, et al.. On-chip and freestanding elastic carbon films for micro-supercapacitors. Science, 2016, 351 (6274), pp.691-695. ⟨10.1126/science.aad3345⟩. ⟨hal-01489186⟩
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