Study of the interaction between a Zirconium thin film and an EN C100 steel substrate: temperature effect

Karim Benouareth (1, 2) , Pascal Tristant (2) , Cédric Jaoul (2) , Christophe Le Niniven (2) , Corinne Nouveau (3) , Christelle Dublanche-Tixier (2) , Abderrahman Bouabellou (1)

1 Laboratoire des Couches Minces et Interfaces
2 SPCTS - Science des Procédés Céramiques et de Traitements de Surface
3 LABOMAP - Laboratoire Bourguignon des Matériaux et Procédés

Zirconium thin films were grown on high carbon steel substrates EN C100 (1 %wt. of carbon) by RF magnetron sputtering. In order to study the reactivity of the film/substrate system as a function of the temperature, one hour vacuum annealing was carried out for different temperatures between 600°C and 1100°C. The films were then analyzed by X-ray diffraction, scanning electron microscopy, glow discharge optical emission spectroscopy (GDOES) and nanoindentation. The obtained results showed a progressive transformation of zirconium film to zirconium carbide. Carbon atoms diffusion from substrate toward the film induced this transformation. The sample annealed at 900°C exhibited the best mechanicals properties (H =17 GPa and E = 220 GPa). Samples treated at higher temperature were affected by oxidation and high microporosity. Even if the conversion is uncomplete, annealing significantly promotes adhesion of the film on the substrate.

Mots clés: Diffusion; Sputtering; Heat treatment; Zirconium Carbide; Hardness

Domaines: Matériaux; Génie des procédés

Karim Benouareth, Pascal Tristant, Cédric Jaoul, Christophe Le Niniven, Corinne Nouveau, et al.. Study of the interaction between a Zirconium thin film and an EN C100 steel substrate: temperature effect. Vacuum, 2016, 125, pp.234-239. ⟨10.1016/j.vacuum.2015.11.002⟩. ⟨hal-01486957⟩