Evidence of the Ge nonreactivity during the initial stage of SiGe oxidation

A. Dkhissi , A. K. Upadhyay , Anne Hémeryck , A. Esteve , Georges Landa (1) , P. Pochet , M. Djafari Rouhani

1 LAAS - Laboratoire d'analyse et d'architecture des systèmes

no abstract

Domaines: Matière Condensée [cond-mat]

A. Dkhissi, A. K. Upadhyay, Anne Hémeryck, A. Esteve, Georges Landa, et al.. Evidence of the Ge nonreactivity during the initial stage of SiGe oxidation. Applied Physics Letters, 2009, 94 (4), ⟨10.1063/1.3076092⟩. ⟨hal-01481819⟩