Calibration procedures for quantitative multiple wavelengths reflectance microscopy

Yasmine Fedala (1) , Sorin Munteanu (2) , Frédéric Kanoufi (2) , Gilles Tessier (1) , Jean-Paul Roger (1) , Chang Wu (3) , Fabien Amiot (3)

1 Physique des ondes pour la médecine
2 PECSA - Physicochimie des Electrolytes, Colloïdes et Sciences Analytiques
3 FEMTO-ST - Franche-Comté Électronique Mécanique, Thermique et Optique - Sciences et Technologies (UMR 6174)

In order to characterize surface chemo-mechanical phenomena driving micro-electro-mechanical systems (MEMSs) behavior, it has been previously proposed to use reflected intensity fields obtained from a standard microscope for different illumination wavelengths.Wavelength-dependent and -independent reflectivity fields are obtained from these images, provided the relative reflectance sensitivities ratio can be identified. This contribution focuses on the necessary calibration procedures and mathematical methods allowing for a quantitative conversion from a mechanically induced reflectivity field to a surface rotation field, therefore paving the way for a quantitative mechanical analysis of MEMS under chemical loading.

Domaines: Instrumentations et Détecteurs [physics.ins-det]; Mécanique [physics.med-ph]

Yasmine Fedala, Sorin Munteanu, Frédéric Kanoufi, Gilles Tessier, Jean-Paul Roger, et al.. Calibration procedures for quantitative multiple wavelengths reflectance microscopy. Review of Scientific Instruments, 2016, 87 (1), pp.013702. ⟨10.1063/1.4939253⟩. ⟨hal-01480032⟩