Thermal Conductivity Reduction in Fully Suspended and Periodically Patterned Membranes Measured by Electro-Thermal Method

V. Lacatena (1, 2) , M. Haras (1, 2) , J.F. Robillard (1) , T. Skotnicki (2) , Emmanuel Dubois (3) , M. Massoud (4, 5) , P.-O. Chapuis (4) , J.M. Bluet (5) , A. Scibetta

1 IEMN - Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520
2 ST-CROLLES - STMicroelectronics [Crolles]
3 PHENIX - PHysicochimie des Electrolytes et Nanosystèmes InterfaciauX
4 CETHIL - Centre d'Energétique et de Thermique de Lyon
5 INL - S&N - INL - Spectroscopies et Nanomatériaux

Domaines: Thermique [physics.class-ph]

V. Lacatena, M. Haras, J.F. Robillard, T. Skotnicki, Emmanuel Dubois, et al.. Thermal Conductivity Reduction in Fully Suspended and Periodically Patterned Membranes Measured by Electro-Thermal Method. MRS Fall meeting, Symposium II on “Phonons”, Nov 2015, Boston, United States. ⟨hal-01464806⟩