Temperature sensor realized by inkjet printing process on flexible substrate

M. D. D Dankoco (1) , G. Y. y Tesfay (1) , Evangéline Bènevent (1) , Marc Bendahan (1)

1 IM2NP - Institut des Matériaux, de Microélectronique et des Nanosciences de Provence

The objective of this study is to realize a printed and flexible temperature sensor to achieve surface temperature measurement of the human body. The sensor is a thermistor composed silver (Ag) deposited on a Polyimide substrate (Kapton HN). The meander was patterned by inkjet printing with a drop-on demand Jetlab4 (Microfab Technologies Inc.). The resistance temperature coefficients have been studied in the temperature range of 20-60 degrees C with a range of voltage between 0 and 1 V. The stability versus time has also been measured without a sensor layer protection. The sensitive area of the sensor, silver lines width and the gap between the electrical conductors were, respectively 6.2 cm(2), 300 mu m, 60 mu m. The mean temperature sensor sensitivity found was 2.23 x 10(-2) degrees C-1. The results show a good linearity and less than 5% hysteresis in the extended measurement.

Mots clés: Flexible substrate; Temperature sensor; inkjet printing

Domaines: Micro et nanotechnologies/Microélectronique

M. D. D Dankoco, G. Y. y Tesfay, Evangéline Bènevent, Marc Bendahan. Temperature sensor realized by inkjet printing process on flexible substrate. Materials Science and Engineering: B, 2016, 205, pp.1-5. ⟨10.1016/j.mseb.2015.11.003⟩. ⟨hal-01434952⟩