Optical characterization of two-dimensional array of 2048 tilting micromirrors for astronomical spectroscopy

Abstract : A micromirror array composed of 2048 silicon micromirrors measuring 200 x 100 mu m(2) and tilting by 25 degrees was developed as a reconfigurable slit mask for multi-object spectroscopy (MOS) in astronomy. The fill factor, contrast, and mirror deformation at both room and cryogenic temperatures were investigated. Contrast was measured using an optical setup that mimics a MOS instrument, and mirror deformation was characterized using a Twyman-Green interferometer. The results indicate that the array exhibited a fill factor of 82%, a contrast ratio of 1000:1, and surface mirror deformations of 8 nm and 27 nm for mirrors tilted at 298 K and 162 K, respectively. (c) 2013 Optical Society of America
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Submitted on : Friday, January 13, 2017 - 12:02:17 PM
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Michael D. Canonica, Frederic Zamkotsian, Patrick Lanzoni, Wilfried Noell, Nico de Rooij. Optical characterization of two-dimensional array of 2048 tilting micromirrors for astronomical spectroscopy. Optics Express, Optical Society of America, 2013, 21 (19), pp.22400--22409. ⟨10.1364/OE.21.022400⟩. ⟨hal-01434415⟩

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