Metal-oxide-silicon nanophotonics: An efficient integration of plasmonic nano-slots with silicon waveguides
Résumé
We demonstrate key elements of future plasmonic guided optics integrated with CMOS-compatible silicon photonics. Very efficient coupling is provided with metal nano-slot waveguides exhibiting unexpectedly low propagation losses and a broadband sub-50 nm optical confinement.
Mots clés
CMOS integrated circuits
elemental semiconductors
integrated optics
light propagation
nanophotonics
optical losses
plasmonics
CMOS-compatible silicon photonics
Si
metal nanoslot waveguides
metal-oxide-silicon nanophotonics
plasmonic guided optics
optical confinement
propagation losses
plasmonic nanoslots
Couplers
Couplings
silicon waveguides
wavelength 50 nm
metallic slot waveguides
co-directional couplers
Slotline
silicon photonics
Optical coupling
Optical waveguides
Plasmons
Silicon
surface plasmon polariton