Symmetry-breaking in a three-nanomechanical-resonator array for mass detection

Clément Grenat (1) , van Nghi Nguyen (1) , Sébastien Baguet (1) , Régis Dufour (1) , Claude-Henri Lamarque (2)

1 DCS - Dynamique et Contrôle des Structures
2 LTDS - Laboratoire de Tribologie et Dynamique des Systèmes

Due to their accuracy and their size, M/NEMS resonant sensors are present in a lot of domain such as automotive, aerospace and biotechnology. They are used as accelerometers, gyroscopes for inertial navigation and also mass detection which is the target application of this investigation. The literature essentially focus on improving the sensitivity of a single resonator. Mass sensors are now able to detect a mass around a few zeptograms. This work presents a three-nanomechanical-resonator array analysis. The original contribution lies in the use of the array symmetry-breaking for mass detection.

Mots clés: Array; Mass sensing; Exploitation of nonlinearities; MEMS

Domaines: Vibrations [physics.class-ph]; Micro et nanotechnologies/Microélectronique

Clément Grenat, van Nghi Nguyen, Sébastien Baguet, Régis Dufour, Claude-Henri Lamarque. Symmetry-breaking in a three-nanomechanical-resonator array for mass detection. ICTAM2016, 24th International Congress of Theoretical and Applied Mechanics, Aug 2016, Montréal, Canada. pp.21-26. ⟨hal-01369630⟩