Laterally Ordered Sub-10 nm Features Obtained From Directed Self-Assembly of Si-Containing Block Copolymer Thin Films

Yecheol Rho (1) , Karim Aissou (1, 2) , Muhammad Mumtaz (1, 2) , Wonsang Kwon (1) , Gilles Pecastaings (1) , Cristian Mocuta (3) , Stefan Stanecu (3) , Eric Cloutet (1, 2) , Cyril Brochon (1, 2) , Guillaume Fleury (1, 2) , Georges Hadziioannou (1, 2)

1 LCPO - Laboratoire de Chimie des Polymères Organiques
2 Team 4 LCPO : Polymer Materials for Electronic, Energy, Information and Communication Technologies
3 SSOLEIL - Synchrotron SOLEIL

Mots clés: CRYSTALS; MICROSCOPY

Domaines: Polymères

Yecheol Rho, Karim Aissou, Muhammad Mumtaz, Wonsang Kwon, Gilles Pecastaings, et al.. Laterally Ordered Sub-10 nm Features Obtained From Directed Self-Assembly of Si-Containing Block Copolymer Thin Films. Small, 2015, 11 (48), pp.6377-6383. ⟨10.1002/smll.201500439⟩. ⟨hal-01361284⟩