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Communication Dans Un Congrès Année : 2016

Magnetic transition of a nickel target during sputtering process in Ar or Ar/O2 mixtures

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hal-01358835 , version 1 (01-09-2016)

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  • HAL Id : hal-01358835 , version 1

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Amael Caillard, El Mokh Mariem, Thomas Lecas, Anne Lise Thomann. Magnetic transition of a nickel target during sputtering process in Ar or Ar/O2 mixtures. 15th International Conference on Plasma Surface Engineering, Sep 2016, Garmisch-Partenkirchen, Germany. ⟨hal-01358835⟩
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