Analysis of laser energy deposition leading to damage and ablation of HfO2 and Nb2O5 single layers submitted to 500 fs pulses at 1030 and 343 nm

Dam-Bé Douti (1) , Thomas Begou (2) , Fabien Lemarchand (2) , Julien Lumeau (2) , Mireille Commandre (1) , Laurent Gallais (1)

1 ILM - ILM
2 RCMO - RCMO

Domaines: Optique [physics.optics]

Dam-Bé Douti, Thomas Begou, Fabien Lemarchand, Julien Lumeau, Mireille Commandre, et al.. Analysis of laser energy deposition leading to damage and ablation of HfO2 and Nb2O5 single layers submitted to 500 fs pulses at 1030 and 343 nm. Applied physics. A, Materials science & processing, 2016, 122, pp.653. ⟨10.1007/s00339-016-0197-2⟩. ⟨hal-01341559⟩