Prediction of the energy efficiency of an Ar-H2-O2 plasma torch with Ansys Fluent

M Vadon (1) , Y Delannoy (1) , G Chichignoud (1)

1 SIMaP - Science et Ingénierie des Matériaux et Procédés

This study aims at modeling an inductively heated Ar-H2-O2 plasma [1]. This plasma produced by a plasma torch is commonly used for the removal of boron from Silicon [2]. Some modules made at SIMAP-EPM enable us to model the plasma specificities and the interaction of the conducting fluid with the electromagnetic field. The power generated by the coil will be partly dissipated with the joule effect in the conductive parts of the device, partly transmitted into the plasma. The energy transmitted into the plasma will be partly used for chemical reactions, partly used to heat the plasma. However the plasma will also transmit some of its energy to the water-cooled walls with the radiative effects. We define the energy efficiency R eff as the fraction of plasma power provided by the torch to the reactor (in the form of an enthalpy flow and radiation flux). This study aims to predict this ratio for a given set of experiments [3].

Mots clés: Plasma torch; Energy efficiency; Argon; Hydrogen; Oxygen

Domaines: Sciences de l'ingénieur [physics]

M Vadon, Y Delannoy, G Chichignoud. Prediction of the energy efficiency of an Ar-H2-O2 plasma torch with Ansys Fluent. 8th International Conference on Electromagnetic Processing of Materials, Oct 2015, Cannes, France. ⟨hal-01335680⟩