Fully inkjet printed SnO₂ gas sensor on plastic substrate

Mathilde Rieu (1, 2, 3) , Malick Camara (4, 2, 3) , Guy Tournier (1, 2, 3) , Jean-Paul Viricelle (1, 2, 3) , Christophe Pijolat (1, 2, 3) , Nicolaas F de Rooij (4) , Danick Briand (4) , J.P. Viricelle (1, 2, 3)

1 LGF-ENSMSE - Laboratoire Georges Friedel
2 PRESSIC-ENSMSE - Procédés et REactivité des Systèmes Solide-gaz, Instrumentation et Capteurs
3 SPIN-ENSMSE - Centre Sciences des Processus Industriels et Naturels
4 IMT - IMT Neuchâtel

A tin dioxide (SnO₂) sensor was fabricated by inkjet printing onto polyimide foil. Gold electrodes and heater were printed on each side of the substrate. A SnO₂ based ink was developed by sol-gel method and jetted onto the electrodes. A final annealing at 400 °C compatible with the polymeric transducers allowed to synthetize the SnO₂ sensing film. Electrical measurements were carried out to characterize the response of the fully printed sensors under oxidizing and reducing gases. The device was heated up at a temperature between 200 and 300 °C using the integrated heater. The proper operation of the full printed metal-oxide gas sensors was validated under exposure to carbon monoxide and nitrogen dioxide, in dry and wet air.

Mots clés: SnO₂ sensor; Sol-gel synthesis; Inkjet printing; Polyimide foil; Gold heater

Domaines: Génie des procédés

Mathilde Rieu, Malick Camara, Guy Tournier, Jean-Paul Viricelle, Christophe Pijolat, et al.. Fully inkjet printed SnO₂ gas sensor on plastic substrate. Sensors and Actuators B: Chemical, 2016, 236, pp.1091-1097. ⟨10.1016/j.snb.2016.06.042⟩. ⟨hal-01330977⟩