Novel SH-SAW gas sensor based on graphene

Ioannis Nikolaou (1) , Hamida Hallil (1) , Georges Deligeorgis (2) , Véronique Conédéra (3) , Hermenegildo Garcia (4) , Corinne Dejous (1) , Dominique Rebière (1)

1 IMS - Laboratoire de l'intégration, du matériau au système
2 FORTH - Foundation for Research and Technology - Hellas
3 LAAS-TEAM - Service Techniques et Équipements Appliqués à la Microélectronique
4 UPV - Universitat Politècnica de València = Universitad Politecnica de Valencia = Polytechnic University of Valencia

In this article, a novel gas sensor platform has been studied. Several layers of graphene have been deposited on a SH-SAW, as a sensitive layer. Innovative methods of graphene solutions have been prepared in order to explore gas sensing applications. The real time detection measurement of the coated sensor under ethanol and humidity is presented. The adsorption of vapors leads to a frequency shift of 10.5 kHz and 22.7 kHz, at exposure of 100 ppm of ethanol and 6.22% of Relative Humidity, respectively. The experiments have been realized at room temperature; rapid response and recovery time were observed. © (2015) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.

Mots clés: Gas sensors; Graphene; Humidity; Bioalcohols; Adsorption; Sensors

Domaines: Micro et nanotechnologies/Microélectronique

Ioannis Nikolaou, Hamida Hallil, Georges Deligeorgis, Véronique Conédéra, Hermenegildo Garcia, et al.. Novel SH-SAW gas sensor based on graphene. SPIE 9517, Smart Sensors, Actuators, and MEMS VII; and Cyber Physical Systems, May 2015, Barcelona, Spain. ⟨10.1117/12.2178260⟩. ⟨hal-01308534⟩