Micro EDM with the in situ electrochemical fabrication and regeneration of the tungsten microelectrode tool

G Girardin (1) , Y Layouni (1) , P Morin (1) , M Cabrera (1)

1 INL - LOCI - INL - Lab-On-Chip et Instrumentation

A new process for the fabrication of cylindrical microelectrode tools with high aspect ratio for microelectrical discharge machining (µEDM) is reported. Tungsten micro-tools with a diameter ranging from 1 µm to 26 µm and aspect ratio ranging from 15 to 20 are obtained in about 30 minutes with a low cost and automated technique. This one is based on the electrochemical etching of the tool material with a process which has fully been integrated in a milling µEDM machine. As proof of interest, preliminary examples of µEDM machining are also reported with the 26 µm diameter tool. After µEDM machining, fast and automated in situ tool regeneration is also demonstrated. This may be of great help to simplify the tool wear compensation algorithm during µEDM milling.

Mots clés: micro EDM; microelectrical discharge machining; electrochemistry; microelectrode; micromachining

Domaines: Sciences de l'ingénieur [physics]

G Girardin, Y Layouni, P Morin, M Cabrera. Micro EDM with the in situ electrochemical fabrication and regeneration of the tungsten microelectrode tool. 13th International ESAFORM Conference on Material Forming, Apr 2010, Brescia, Italy. ⟨hal-01306833⟩