Influence of mechanical noise inside a scanning electron microscope.

Marcelo Gaudenzi de Faria (1) , Yassine Haddab (1) , Yann Le Gorrec (1) , Philippe Lutz (1)

1 FEMTO-ST - Franche-Comté Électronique Mécanique, Thermique et Optique - Sciences et Technologies (UMR 6174)

The scanning electron microscope is becoming a popular tool to perform tasks that require positioning, manipulation, characterization, and assembly of micro-components. However, some of these applications require a higher level of performance with respect to dynamics and precision of positioning. One limiting factor is the presence of unidentified noises and disturbances. This work aims to study the influence of mechanical disturbances generated by the environment and by the microscope, identifying how these can affect elements in the vacuum chamber. To achieve this objective, a dedicated setup, including a high-resolution vibrometer, was built inside the microscope. This work led to the identification and quantification of main disturbances and noise sources acting on a scanning electron microscope. Furthermore, the effects of external acoustic excitations were analysed. Potential applications of these results include noise compensation and real-time control for high accuracy tasks.

Domaines: Automatique / Robotique

Marcelo Gaudenzi de Faria, Yassine Haddab, Yann Le Gorrec, Philippe Lutz. Influence of mechanical noise inside a scanning electron microscope.. Review of Scientific Instruments, 2015, 86 (4), pp.045105. ⟨10.1063/1.4917557⟩. ⟨hal-01303490⟩