Nondestructive mapping of chemical composition and structural qualities of group III-nitride nanowires using submicron beam synchrotron-based X-ray diffraction

P. L. Bonanno (1) , S. Gautier (2) , Y. El Gmili (1) , T. Moudakir (1) , A. A. Sirenko (3) , A. Kazimirov (4) , Z-H. Cai (5) , J. Martin (2) , W. H. Goh (1) , A. Martinez (6) , A. Ramdane (6) , L. Le Gratiet (6) , N. Maloufi (7) , Badreddine Assouar (8) , A. Ougazzaden (1)

1 Georgia Tech Lorraine [Metz]
2 LMOPS - Laboratoire Matériaux Optiques, Photonique et Systèmes
3 NJIT - New Jersey Institute of Technology [Newark]
4 Cornell University [New York]
5 APS - Advanced Photon Source [ANL]
6 LPN - Laboratoire de photonique et de nanostructures
7 LEM3 - Laboratoire d'Etude des Microstructures et de Mécanique des Matériaux
8 IJL - Institut Jean Lamour

Submicron beam synchrotron-based X-ray diffraction (XRD) techniques have been developed and used to accurately and nondestructively map chemical composition and material quality of selectively grown group nanowires. GaN, AlGaN, and InGaN multi-quantum-well nanowires have been selectively grown on lattice matched and mismatched substrates, and the challenges associated with obtaining and interpreting submicron beam XRD results are addressed and solved. Nanoscale cathodoluminescence is used to examine exciton behavior, and energy-dispersive X-ray spectroscopy is used to verify chemical composition. Scanning transmission electron microscopy is later used to paint a more complete picture. The advantages of submicron beam XRD over other techniques are discussed in the context of this challenging material system.

Domaines: Micro et nanotechnologies/Microélectronique; Acoustique [physics.class-ph]; Matériaux

P. L. Bonanno, S. Gautier, Y. El Gmili, T. Moudakir, A. A. Sirenko, et al.. Nondestructive mapping of chemical composition and structural qualities of group III-nitride nanowires using submicron beam synchrotron-based X-ray diffraction. Thin Solid Films, 2013, 541 (SI), pp.46-50. ⟨10.1016/j.tsf.2012.12.099⟩. ⟨hal-01292307⟩