Understanding the phase formation of reactively sputtered zirconium oxide thin films: a joint experimental and theoretical study

Raza Muhsin (1, 2) , Cornil D. (2) , Cornil J. (2) , Anne-Lise Thomann (3) , Amaël Caillard (3) , El Mokh Mariem (3) , Eric Gautron (4) , El Mel A.A. (4) , Lucas S. (5) , Rony Snyders (1, 6) , Stephanos Konstantinidis (1)

1 ChIPS - Chimie des Interactions Plasma-Surface (ChIPS)
2 Service de Chimie des Matériaux Nouveaux, CIRMAP, University of Mons
3 GREMI - Groupe de recherches sur l'énergétique des milieux ionisés
4 IMN - Institut des Matériaux Jean Rouxel
5 UNamur - Université de Namur [Namur]
6 MNRC - Materia Nova Research Center

Domaines: Matériaux

Raza Muhsin, Cornil D., Cornil J., Anne-Lise Thomann, Amaël Caillard, et al.. Understanding the phase formation of reactively sputtered zirconium oxide thin films: a joint experimental and theoretical study. European Material Research Society (E-MRS 2015) Spring Meeting , May 2015, Lille, France. ⟨hal-01290636⟩