Low voltage MEMS digital loudspeaker array based on thin-film PZT actuators

S Fanget (1) , F Casset (1) , R Dejaeger (2) , F Maire (3) , B Desloges (4) , J Deutzer (5) , R Morisson (5) , Y Bohard (5) , B Laroche (3) , J Escato (3) , Quentin Leclere (2)

1 CEA-LETI - Commissariat à l'énergie atomique et aux énergies alternatives - Laboratoire d'Electronique et de Technologie de l'Information
2 LVA - Laboratoire Vibrations Acoustique
3 focal
4 DIHS - Département Intégration Hétérogène sur Silicium
5 easiic

This paper reports on the development of a Digital Loudspeaker Array (DLA) solution based on Pb(Zr 0.52 ,Ti 0.48)O 3 (PZT) thin-film actuated membranes. These membranes called speaklets are arranged in a matrix and operate in a binary manner by emitting short pulses of sound pressure. Using the principle of additivity of pressures in the air, it is possible to reconstruct audible sounds. For the first time, electromechanical and acoustic characterizations are reported on a 256-MEMS-membranes DLA. Sounds audible as far as several meters from the loudspeaker have been generated using low voltage (8V).

Mots clés: MEMS; Digital Loudspeaker; PZT; Actuators; Piezoelectric; Silicon membranes

Domaines: Acoustique [physics.class-ph]

S Fanget, F Casset, R Dejaeger, F Maire, B Desloges, et al.. Low voltage MEMS digital loudspeaker array based on thin-film PZT actuators. 2015 International Congress on Ultrasonics, May 2015, Metz, France. pp.983-986, ⟨10.1016/j.phpro.2015.08.205⟩. ⟨hal-01290246⟩