Study of energy transfers at the substrate during “transition steps” in magnetron sputter deposition

Anne-Lise Thomann (1) , El Mariem (1) , Amaël Caillard (1) , Nadjib Semmar (1) , Thomas Lecas (1) , Remi Dussart (1) , Raza Mohsin (2) , de Vreese Audrey (2) , Stephanos Konstantinidis (3)

1 GREMI - Groupe de recherches sur l'énergétique des milieux ionisés
2 CHIPS - Laboratoire de Chimie des Interactions Plasma Surface
3 ChIPS - Chimie des Interactions Plasma-Surface (ChIPS)

Domaines: Matériaux

Anne-Lise Thomann, El Mariem, Amaël Caillard, Nadjib Semmar, Thomas Lecas, et al.. Study of energy transfers at the substrate during “transition steps” in magnetron sputter deposition . 14th International Conference on Plasma Surface Engineering PSE 2014 , Sep 2014, Garmisch-Partenkirchen, Germany. ⟨hal-01289446⟩