Balanced/unbalanced planar magnetron plasma behaviour. Microscopic analysis by PIC-MCC modelling of the ion flux on thermal probes

Tiberiu Minea (1) , Lise Caillault (1) , Pierre-Antoine Cormier (2) , Remi Dussart (2) , Nadjib Semmar (2) , Laurent Schwaederlé (2) , Anne-Lise Thomann (2)

1 LPGP - Laboratoire de physique des gaz et des plasmas
2 GREMI - Groupe de recherches sur l'énergétique des milieux ionisés

Domaines: Matériaux

Tiberiu Minea, Lise Caillault, Pierre-Antoine Cormier, Remi Dussart, Nadjib Semmar, et al.. Balanced/unbalanced planar magnetron plasma behaviour. Microscopic analysis by PIC-MCC modelling of the ion flux on thermal probes . 13th International Conference on Plasma Surface Engineering PSE 2012, Sep 2012, Garmisch-Partenkirchen, Germany. ⟨hal-01288936⟩