An attempt towards a direct scatterometer

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Conference papers
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https://hal.archives-ouvertes.fr/hal-01279014
Contributor : Michel Lequime <>
Submitted on : Thursday, February 25, 2016 - 1:06:42 PM
Last modification on : Monday, March 4, 2019 - 2:04:24 PM

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Claude Amra, Myriam Zerrad, Michel Lequime, Simona Liukaityte. An attempt towards a direct scatterometer. Optical Systems Design 2015, Sep 2015, Jena, Germany. pp.96270R. ⟨hal-01279014⟩

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