High-resolution three-dimensional structural microscopy by single-angle Bragg ptychography

Abstract : Coherent x-ray microscopy by phase retrieval of Bragg diffraction intensities enables lattice distortions within a crystal to be imaged at nanometer-scale spatial resolutions in three dimensions (3D). While this capability can be used to resolve structure-property relationships at the nanoscale under working conditions, strict data measurement requirements can limit the application of current approaches. Here, we introduce an efficient method of imaging 3D nanoscale lattice behavior and strain fields in crystalline materials with a new methodology: 3D Bragg projection ptychography (3DBPP). This method enables 3D image reconstruction of a crystal volume from a series of two dimensional x-ray Bragg coherent intensity diffraction patterns measured at a single incident beam angle. Structural information about the sample is encoded along two reciprocal space directions normal to the Bragg diffracted exit beam, and along the third dimension in real space by the scanning beam. We present our approach with an analytical derivation, a numerical demonstration, and an experimental reconstruction of lattice distortions in a component of a nanoelectronic prototype device.
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Submitted on : Tuesday, November 15, 2016 - 9:58:31 AM
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S. O. Hruszkewycz, M. Allain, M. V. Holt, C. E. Murray, J. R. Holt, et al.. High-resolution three-dimensional structural microscopy by single-angle Bragg ptychography. Nature Materials, Nature Publishing Group, 2017, 16, pp.244-251. ⟨10.1038/nmat4798⟩. ⟨hal-01252892⟩



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