High-resolution three-dimensional structural microscopy by single-angle Bragg ptychography

Abstract : Coherent x-ray microscopy by phase retrieval of Bragg diffraction intensities enables lattice distortions within a crystal to be imaged at nanometer-scale spatial resolutions in three dimensions (3D). While this capability can be used to resolve structure-property relationships at the nanoscale under working conditions, strict data measurement requirements can limit the application of current approaches. Here, we introduce an efficient method of imaging 3D nanoscale lattice behavior and strain fields in crystalline materials with a new methodology: 3D Bragg projection ptychography (3DBPP). This method enables 3D image reconstruction of a crystal volume from a series of two dimensional x-ray Bragg coherent intensity diffraction patterns measured at a single incident beam angle. Structural information about the sample is encoded along two reciprocal space directions normal to the Bragg diffracted exit beam, and along the third dimension in real space by the scanning beam. We present our approach with an analytical derivation, a numerical demonstration, and an experimental reconstruction of lattice distortions in a component of a nanoelectronic prototype device.
Document type :
Journal articles
Complete list of metadatas

Cited literature [43 references]  Display  Hide  Download

https://hal.archives-ouvertes.fr/hal-01252892
Contributor : Patrick Ferrand <>
Submitted on : Tuesday, November 15, 2016 - 9:58:31 AM
Last modification on : Monday, March 4, 2019 - 2:04:25 PM
Long-term archiving on : Thursday, March 16, 2017 - 11:57:55 AM

Files

3DBPP_accepted.pdf
Files produced by the author(s)

Identifiers

Collections

Citation

S. O. Hruszkewycz, M. Allain, M. V. Holt, C. E. Murray, J. R. Holt, et al.. High-resolution three-dimensional structural microscopy by single-angle Bragg ptychography. Nature Materials, Nature Publishing Group, 2017, 16, pp.244-251. ⟨10.1038/nmat4798⟩. ⟨hal-01252892⟩

Share

Metrics

Record views

399

Files downloads

283