Structural investigation of nanoporous alumina film with grazing incidence small angle X-ray scattering

D. Buttard (1) , T. Schuelli , Rémi Lazzari (2)

1 SiNaps - Silicon Nanoelectronics Photonics and Structures
2 INSP - Institut des Nanosciences de Paris

Nanoporous alumina films (NPAF) have been elaborated by anodization of an aluminum film on silicon wafer. Ex situ structural characterization of the films has been achieved with grazing incidence small angle X-ray scattering under ultra high vacuum atmosphere and using a synchrotron source. The comparison of the experimental patterns with suitable modeling confirms the cylindrical geometry of the pores well as the good local hexagonal order. (C) 2013 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim

Mots clés: GISAXS; nanoporous alumina; structure

Domaines: Matière Condensée [cond-mat]

D. Buttard, T. Schuelli, Rémi Lazzari. Structural investigation of nanoporous alumina film with grazing incidence small angle X-ray scattering. physica status solidi (a), 2013, 210 (11), pp.2521-2525. ⟨10.1002/pssa.201330024⟩. ⟨hal-01243107⟩