Inkjet printed SnO₂ gas sensor on plastic substrate

Mathilde Rieu (1, 2, 3) , El Hadji Malik Camara (4) , Guy Tournier (1, 2, 3) , Jean-Paul Viricelle (1, 2, 3) , Christophe Pijolat (1, 2, 3) , Nicolaas F de Rooij (4) , Danick Briand (4)

1 PRESSIC-ENSMSE - Procédés et REactivité des Systèmes Solide-gaz, Instrumentation et Capteurs
2 LGF-ENSMSE - Laboratoire Georges Friedel
3 SPIN-ENSMSE - Centre Sciences des Processus Industriels et Naturels
4 IMT - IMT Neuchâtel

We report on the development of a metal oxide (MO_x) sensor prepared by inkjet printing technology onto polyimide foil. Gold electrodes and a gold heater were printed on each side of the substrate, respectively. SnO₂ based ink was developed by sol-gel method and printed onto the electrodes. A final annealing at 400 °C compatible with the polymeric transducers allows to synthetize the SnO₂ film. Electrical measurements were carried out to characterize the response of fully printed sensor under different gases. The device was operated at a temperature between 200 and 300 °C using the integrated heater. The sensor exhibited responses to carbon monoxide and nitrogen dioxide, under dry and wet air.

Mots clés: SnO₂ gas sensor; sol-gel synthesis; inkjet printing; polyimide foil

Domaines: Génie des procédés

Mathilde Rieu, El Hadji Malik Camara, Guy Tournier, Jean-Paul Viricelle, Christophe Pijolat, et al.. Inkjet printed SnO₂ gas sensor on plastic substrate. Eurosensors 2015, Sep 2015, Freibourg, Germany. pp.75-78, ⟨10.1016/j.proeng.2015.08.569⟩. ⟨hal-01234940⟩