Understanding the amorphous-to-microcrystalline silicon transition in SiF4/H2/Ar gas mixtures

Jean-Christophe Dornstetter (1) , Bastien Bruneau (1) , Pavel Bulkin , Erik V. Johnson (2) , Pere Roca I Cabarrocas (1)

1 LPICM - Laboratoire de physique des interfaces et des couches minces [Palaiseau]
2 UL2 - Université Lumière - Lyon 2

Domaines: Physique [physics]; Sciences de l'ingénieur [physics]

Jean-Christophe Dornstetter, Bastien Bruneau, Pavel Bulkin, Erik V. Johnson, Pere Roca I Cabarrocas. Understanding the amorphous-to-microcrystalline silicon transition in SiF4/H2/Ar gas mixtures. Journal of Chemical Physics, 2014, 140 (23), ⟨10.1063/1.4883503⟩. ⟨hal-01230708⟩